کتاب دانلود کتب لاتین علوم مهندسینانوفناوری و نانومواد
میکروسکوپ نیروی اتمی الکتریکی برای نانو الکترونیک
میکروسکوپ نیروی اتمی الکتریکی برای نانو الکترونیک

Electrical Atomic Force Microscopy for Nanoelectronics
نویسنده:
سال انتشار: 2019
تعداد صفحات: 424
زبان فایل: انگلیسی
فرمت فایل: pdf
حجم فایل: 22MB
رمز فایل: www.ketabdownload.com
قیمت: 190,000ريال

افزودن به سبد دانلود

Publisher : Springer

ISBN-10 : 3030156117, 3030156141

ISBN-13 : 978-3030156114, 978-3030156145

ASIN : B07VYXNTYS

The tremendous impact of electronic devices on our lives is the result of continuous improvements of the billions of nanoelectronic components inside integrated circuits (ICs). However, ultra-scaled semiconductor devices require nanometer control of the many parameters essential for their fabrication. Through the years, this created a strong alliance between microscopy techniques and IC manufacturing. This book reviews the latest progress in IC devices, with emphasis on the impact of electrical atomic force microscopy (AFM) techniques for their development. The operation principles of many techniques are introduced, and the associated metrology challenges described. Blending the expertise of industrial specialists and academic researchers, the chapters are dedicated to various AFM methods and their impact on the development of emerging nanoelectronic devices. The goal is to introduce the major electrical AFM methods, following the journey that has seen our lives changed by the advent of ubiquitous nanoelectronics devices, and has extended our capability to sense matter on a scale previously inaccessible.