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Fabrication of Micro/Nano Structures via Precision Machining: Modelling, Processing and Evaluation

Guoqing Zhang, Bin Xu, Yanjun Lu, Suet To, 9819913373, 9789819913374

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English | 2023 | PDF

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Fabrication of Micro/Nano Structures via Precision Machining: Modelling, Processing and Evaluation